This information was published on 2023-09-12T00:27:52 for IP Right Acceptance Published.
| Field | Value |
| (210) | 2353968 (IR 1140912) |
| (220) |
11 Apr 2023
|
| (511) (510) |
Class 7
Machines and equipment for the manufacture or processing of workpieces such as semiconductor products, photovoltaic detectors, solar cells, light-emitting devices (such as LED and OLED), tools and parts, namely vacuum treatment plants for coating, evaporation, plasma treatment and plasma etching, especially vacuum plants for thin-film coating, evaporation, epitaxy and plasma treatment. Class 42 Scientific services and research work, namely the drafting, design and analysis of vacuum treatment processes, especially vacuum coating processes such as sputter deposition, chemical gas phase deposition, epitaxy, also with plasma assistance, of semiconductor products, tools, parts and vacuum treatment plants for manufacturing and processing operations. |
| (540) | NANOSMOOTH |
| (550) | Word |
| (730) |
Evatec AG
|
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